PRODUCT Properties
| Boiling point: | 134-135°C |
| Density | 1.72[at 20℃] |
| form | liquid |
| color | Clear, colourless |
| InChI | InChI=1S/C4Cl4F6/c5-1(9,3(7,11)12)2(6,10)4(8,13)14 |
| InChIKey | IRHYACQPDDXBCB-UHFFFAOYSA-N |
| SMILES | C(Cl)(F)(F)C(Cl)(F)C(Cl)(F)C(Cl)(F)F |
Description and Uses
1,2,3,4-tetrachloro-hexafluoro-butane, also known as A316, is used as an intermediate compound in the synthesis of hexafluoro-1,3-butadiene (also known as C4F6 or HFBD), a stable gas which is used in the semiconductor industry, in particular as etching gas for semiconductor fine processing.
Safety
| Symbol(GHS) |  GHS07 |
| Signal word | Warning |
| Hazard statements | H315-H319-H335 |
| Precautionary statements | P261-P271-P280 |
| Hazard Codes | Xi |
| Risk Statements | 36/37/38 |
| Safety Statements | 26-36 |
| HazardClass | IRRITANT |
| HS Code | 2903779090 |
