A8042612
Tetrakis(trimethylsilyloxy)<WBR>silane , 97% , 3555-47-3
CAS NO.：3555-47-3
Empirical Formula: C12H36O4Si5
Molecular Weight: 384.84
MDL number: MFCD00051587
EINECS: 222-613-4
| Pack Size | Price | Stock | Quantity |
| 1g | RMB67.20 | In Stock |
|
| 5g | RMB240.00 | In Stock |
|
| 25g | RMB758.40 | In Stock |
|
| 100g | RMB2399.20 | In Stock |
|
| others | Enquire |
Update time: 2022-07-08
PRODUCT Properties
| Melting point: | -60 °C |
| Boiling point: | 103-106 °C/2 mmHg (lit.) |
| Density | 0.87 g/mL at 25 °C (lit.) |
| vapor pressure | 27.4hPa at 20℃ |
| refractive index | n |
| Flash point: | 169 °F |
| storage temp. | Inert atmosphere,Room Temperature |
| form | liquid |
| Specific Gravity | 0.868 |
| color | Colorless to Almost colorless |
| Water Solubility | 150.7ng/L at 23℃ |
| Hydrolytic Sensitivity | 4: no reaction with water under neutral conditions |
| BRN | 1793898 |
| LogP | 9 at 25℃ |
Description and Uses
Tetrakis(trimethylsilyloxy)silane (TTMS) is an organosilicon compound used as a precursor to prepare nanostructured organosilicon polymer films by plasma-enhanced chemical vapor deposition (PECVD) at atmospheric pressure. TTMS along with cyclohexane can also be used to synthesize low dielectric constant SiCOH films by PECVD method.
Safety
| Symbol(GHS) |  GHS07 |
| Signal word | Warning |
| Hazard statements | H315-H319-H335 |
| Precautionary statements | P261-P264-P271-P280-P302+P352-P305+P351+P338 |
| Hazard Codes | Xi |
| Risk Statements | 36/37/38 |
| Safety Statements | 26-36 |
| WGK Germany | 3 |
| TSCA | Yes |
| HS Code | 29319090 |
